Error Criteria for Remeshing in Dopant Diffusion Problems

The finite clement method is used more efficiently by applying a remeshing technique. The criteria for remeshing is based on an a posleriori error estimator. Both global and local error indicators are investigated. It is found that although the local error values arc larger than the global error, it can locate where the maximum errors are in the finite clement mesh. Its main advantage over global error evaluation is that it requires less CPU time to compute and thus is more suited for adaptive meshing applications in two dimensions. Results obtained when simulating a typical 2 dimensional MOS source/drain diffusion indicate a substantial reduction in runtime as compared to a solution using a static mesh.